Customization: | Available |
---|---|
CAS No.: | 7803-62-5 |
Formula: | Sih4 |
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Product Details
CAS No.: 7803-62-5Component | 99.99% | 99.999% | 99.9999% | Unit |
Oxygen (Ar) | ≤1 | ≤0.4 | ≤0.1 | ppmV |
Nitrogen | ≤1 | ≤0.2 | ≤0.1 | ppmV |
Hydrogen | ≤50 | ≤30 | ≤20 | ppmV |
Helium | / | ≤10 | ≤10 | ppmV |
CO+CO2 | ≤0.2 | ≤0.4 | ≤0.1 | ppmV |
THC | ≤0.2 | ≤0.2 | ≤0.1 | ppmV |
Chlorosilanes | ≤15 | ≤0.2 | ≤0.1 | ppmV |
Disiloxane | ≤1 | ≤0.2 | ≤0.1 | ppmV |
Disilane | ≤1 | ≤0.2 | ≤0.1 | ppmV |
Moisture (H2O) | ≤1 | ≤0.2 | ≤0.1 | ppmV |