CAS No.: | 7803-62-5 |
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Formula: | Sih4 |
EINECS: | 232-263-4 |
Constituent: | Industrial Pure Air |
Grade Standard: | Electronic Grade |
Chemical Property: | Inflammable Gas |
Customization: |
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Product Details
CAS No.: 7803-62-5Component | 99.99% | 99.999% | 99.9999% | Unit |
Oxygen (Ar) | ≤1 | ≤0.4 | ≤0.1 | ppmV |
Nitrogen | ≤1 | ≤0.2 | ≤0.1 | ppmV |
Hydrogen | ≤50 | ≤30 | ≤20 | ppmV |
Helium | / | ≤10 | ≤10 | ppmV |
CO+CO2 | ≤0.2 | ≤0.4 | ≤0.1 | ppmV |
THC | ≤0.2 | ≤0.2 | ≤0.1 | ppmV |
Chlorosilanes | ≤15 | ≤0.2 | ≤0.1 | ppmV |
Disiloxane | ≤1 | ≤0.2 | ≤0.1 | ppmV |
Disilane | ≤1 | ≤0.2 | ≤0.1 | ppmV |
Moisture (H2O) | ≤1 | ≤0.2 | ≤0.1 | ppmV |
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